Name
Title | ||
|---|---|---|
An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films. |
Abstract | ||
|---|---|---|
An experimental design utilizing artificial neural networks (ANNs), the Taguchi method, and the genetic algorithm (GA) is proposed to obtain optimal processing parameters for cathode arc plasma deposition of ZnO thin films on a glass substrate. The Taguchi method's orthogonal array is used to minimize the number of required experiments and to gather the experimental data. An ANN is then used to co... |
Year | DOI | Venue |
|---|---|---|
2016 | 10.1109/TASE.2016.2572223 | IEEE Transactions on Automation Science and Engineering |
Keywords | Field | DocType |
Zinc oxide,II-VI semiconductor materials,Genetic algorithms,Signal to noise ratio,Thin films,Artificial neural networks | Orthogonal array,Mathematical optimization,Computer science,Signal-to-noise ratio,Electronic engineering,Transmittance,Taguchi methods,Plasma,Thin film,Cathode,Optoelectronics,Electrical resistivity and conductivity | Journal |
Volume | Issue | ISSN |
13 | 4 | 1545-5955 |
Citations | PageRank | References |
1 | 0.38 | 15 |
Authors | ||
5 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Shuo-Fu Hsu | 1 | 1 | 0.38 |
| Min-Hang Weng | 2 | 1 | 4.10 |
| Ru-yuan Yang | 3 | 1 | 3.08 |
| Chun-Hsiung Fang | 4 | 4 | 1.13 |
| jyhhorng | 5 | 21 | 3.61 |