Name
Abstract | ||
|---|---|---|
This paper presents a novel microelectromechanical systems (MEMS) implementation of an on- chip atomic force microscope (AFM), fabricated using a silicon-on-insulator process. The device features an XY scanner with electrostatic actuators and electrothermal sensors, as well as an integrated silicon microcantilever. A single AlN piezoelectric electrode is used for simultaneous actuation and deflection sensing of the cantilever via a charge sensing technique. With the device being operated in closed loop, the probe scanner is successfully used to obtain 8 mu m x 8 mu m tapping-mode AFM images of a calibration grating. |
Year | Venue | Field |
|---|---|---|
2017 | 2017 AMERICAN CONTROL CONFERENCE (ACC) | Silicon on insulator,Nanotechnology,Grating,Microelectromechanical systems,Computer science,Cantilever,Control theory,Chip,Scanner,Optoelectronics,Actuator,Piezoelectricity |
DocType | ISSN | Citations |
Conference | 0743-1619 | 0 |
PageRank | References | Authors |
0.34 | 2 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Mohammad Maroufi | 1 | 13 | 4.00 |
| Michael G. Ruppert | 2 | 5 | 3.37 |
| Anthony G. Fowler | 3 | 4 | 2.04 |
| S. O. Reza Moheimani | 4 | 25 | 7.64 |