Name
Title | ||
|---|---|---|
Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution. |
Abstract | ||
|---|---|---|
Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemented obtaining low temperature drift and excellent long time stability. The sensor is fabricated by applying a simple micromachining procedure to a chip produced using the BCD6s process of STMicroelectronics. Application of a gas conveyor allowed inclusion of the sensing structure into a channel of sub-millimeter cross-section. The results of measurements performed by making controlled air volumes pass through the sensor channel in both directions at rates from 0.1 to 5 mL/min are described. |
Year | DOI | Venue |
|---|---|---|
2017 | 10.3390/s17112497 | SENSORS |
Keywords | Field | DocType |
gas volume measurement,MEMS flow sensor,thermal flow sensor,system on a chip | Analytical chemistry,System on a chip,Surface micromachining,Microelectromechanical systems,Flow (psychology),Communication channel,Chip,Electronic engineering,Engineering,Offset (computer science),Instrumentation | Journal |
Volume | Issue | ISSN |
17 | 11.0 | 1424-8220 |
Citations | PageRank | References |
0 | 0.34 | 4 |
Authors | ||
3 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| M. Piotto | 1 | 36 | 8.97 |
| Simone Del Cesta | 2 | 0 | 0.68 |
| Paolo Bruschi | 3 | 62 | 17.83 |