Paper Info
Title
Development of high accuracy of magnetic levitation transport system for OLED evaporation process.
Abstract
Recently, in the manufacturing process of flat panel displays, mass production method of the in-line system has been emerged. In particular, the next generation OLED display manufacturing process, horizontal in-line evaporation process has been tried. It is important for the success of OLED inline evaporation process to develop a magnetic levitation transport system capable of transferring a carrier equipped with a mother glass with high accuracy without any physical contact along the rail under vacuum condition. In the case of existing wheel-based transfer system, it is not suitable for OLED evaporation process requiring high cleanliness. On the other hand, the magnetic levitation transport system has an advantage that it does not generate any dust and it is possible to achieve high-precision control because there are not non-linear factors such as friction force. In this paper, we introduce the high accuracy magnetic levitation transport system for OLED evaporation process currently under development and design of levitation controller using cascade control consisting of current control (PI) and airgap control (PID).
Year
Venue
Field
2017
AIM
Control theory,Evaporation,Propulsion,PID controller,OLED,Computer science,Electromagnet,Control engineering,Magnetic levitation,Levitation
DocType
Citations 
PageRank 
Conference
0
0.34
References 
Authors
0
3
Name
Order
Citations
PageRank
Chang-Wan Ha112.09
Changhyun Kim221.39
Jaewon Lim301.35