Name
Title | ||
|---|---|---|
Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property. |
Abstract | ||
|---|---|---|
Piezoelectric-actuator-driven nanopositioning stages, with large stroke and low crosstalk, are quite appealing for fulfilling the through-silicon via lithography etching task. The motivation of this paper is to combine the ability to enable the nanopositioning stage running in a manner of millimeter scale workspace and nanometer scale positioning accuracy. Two pairs of flexure-guided kinematic mod... |
Year | DOI | Venue |
|---|---|---|
2018 | 10.1109/TIE.2017.2758749 | IEEE Transactions on Industrial Electronics |
Keywords | Field | DocType |
Nanopositioning,Actuators,Kinematics,Through-silicon vias,Prototypes,Force,Fasteners | Particle swarm optimization,Bode plot,Kinematics,PID controller,Repetitive control,Workspace,Control theory,Decoupling (cosmology),Control engineering,Engineering,Actuator | Journal |
Volume | Issue | ISSN |
65 | 5 | 0278-0046 |
Citations | PageRank | References |
1 | 0.37 | 0 |
Authors | ||
11 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Hui Tang | 1 | 2 | 4.12 |
| Gao Jian | 2 | 60 | 9.77 |
| Xun Chen | 3 | 458 | 52.73 |
| K. M. Yu | 4 | 16 | 3.55 |
| Sandy To | 5 | 4 | 1.87 |
| Yunbo He | 6 | 4 | 3.32 |
| Xun Chen | 7 | 1 | 0.37 |
| Zhaohe Zeng | 8 | 1 | 0.37 |
| Sifeng He | 9 | 1 | 2.06 |
| Chuangbin Chen | 10 | 4 | 0.77 |
| Yangmin Li | 11 | 654 | 87.28 |