Title
UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film.
Abstract
ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 mu m. The influence of UV light illumination on C2H5OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C2H5OH characteristics in terms of high sensitivity, excellent selectivity, rapid response/recovery, and low detection limit down to 0.1 ppm. The excellent sensing performance of the sensor with UV activation could be attributed to the photocatalytic oxidation of ethanol on the surface of the ZnO film, the planar film structure with high utilizing efficiency of UV light, high electron mobility, and a good surface/volume ratio of of ZnO film with a relatively rough and porous surface.
Year
DOI
Venue
2018
10.3390/s18010050
SENSORS
Keywords
Field
DocType
ZnO film,UV illumination,magnetron sputtering,ethanol sensing properties
Detection limit,Photocatalysis,Analytical chemistry,Cavity magnetron,Porosity,Sputter deposition,Engineering,Surface-area-to-volume ratio,Optoelectronics,Selectivity,Electron mobility
Journal
Volume
Issue
ISSN
18
1.0
1424-8220
Citations 
PageRank 
References 
0
0.34
0
Authors
7
Name
Order
Citations
PageRank
Jinyu Huang120.83
Yu Du26510.11
Quan Wang3195.34
Hao Zhang442.08
Youfu Geng500.68
Xuejin Li6114.31
Xiaoqing Tian700.34