Paper Info
Title
Comprehensive assessment of MEMS double touch mode capacitive pressure sensor on utilization of SiC film as primary sensing element: Mathematical modelling and numerical simulation.
Abstract
Capacitive Pressure Sensors have consistently been an indispensable application of MEMS (Micro Electro Mechanical Systems) because of their utility and precision. Silicon has proven to be a dominant material in MEMS based sensor design but it is unfit for applications operating in harsh environmental conditions. Silicon Carbide is a justified replacement to Silicon in these conditions due to its solitary attribute of robustness and high temperature tolerance. This work introduces a Silicon Carbide and Aluminum Nitride based DTMCPS (Double Touch Mode Capacitive Pressure Sensor) with a substrate notch. Condensed yet exhaustive step by step mathematics of key performance parameters have been detailed for the sensor under study. This is done to provide a detailed understanding of the underlying physical and mathematical principles. It also aims to provide a fast analysis model for prototyping the sensor to bypass the need for bulky simulation software. A Finite Element Analysis (FEM) analysis for the design was conducted using COMSOL and the results agree with the mathematical model. It is evident from numerical simulation and the FEM analysis that the proposed sensor provides better performance than comparable designs reported in literature.
Year
DOI
Venue
2018
10.1016/j.mejo.2018.01.002
Microelectronics Journal
Keywords
Field
DocType
Touch mode capacitive pressure sensor,Second notch,Capacitive sensitivity,Capacitance in near linear range,Touch point pressure,Harsh environmental condition,Silicon carbide
Simulation software,Computer simulation,Microelectromechanical systems,Silicon carbide,Capacitive sensing,Electronic engineering,Finite element method,Pressure sensor,Engineering,Silicon
Journal
Volume
ISSN
Citations 
73
0026-2692
2
PageRank 
References 
Authors
0.70
0
3
Name
Order
Citations
PageRank
Sumit Kumar Jindal120.70
M. Aditya Varma220.70
Deepali Thukral320.70