Name
Title | ||
|---|---|---|
H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems. |
Abstract | ||
|---|---|---|
Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 mu m, and a biaxial H infinity robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID) closed-loop control, H infinity robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 mu m under the H infinity robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within +/- 0.0014 degrees. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM) spectral linewidth of 96 cm(-1) under the H infinity robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions. |
Year | DOI | Venue |
|---|---|---|
2018 | 10.3390/s18020508 | SENSORS |
Keywords | Field | DocType |
electrothermal micromirror,robust control,bimorph actuator modeling,active tilting rejection,Fourier transform spectrometer | Analytical chemistry,Control theory,PID controller,Laser linewidth,Microelectromechanical systems,Spectrometer,Fourier transform,Robustness (computer science),Electronic engineering,Engineering,Robust control | Journal |
Volume | Issue | ISSN |
18 | 2.0 | 1424-8220 |
Citations | PageRank | References |
2 | 0.44 | 4 |
Authors | ||
7 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Huipeng Chen | 1 | 3 | 4.16 |
| Mengyuan Li | 2 | 15 | 2.36 |
| Yi Zhang | 3 | 400 | 77.93 |
| Huikai Xie | 4 | 39 | 9.09 |
| Chang Chen | 5 | 10 | 5.44 |
| Zhangming Peng | 6 | 2 | 0.77 |
| Shaohui Su | 7 | 3 | 2.15 |