Name
Title | ||
|---|---|---|
A 0.18-Mu M Cmos Time-Domain Capacitive-Sensor Interface For Sub-1mg Mems Accelerometers |
Abstract | ||
|---|---|---|
A high-resolution capacitive-sensor interface for sub-1mG MEMS accelerometers is presented herein. A time-domain capacitive-sensor interface based on a relaxation oscillator with noise reduction is proposed to achieve a high resolution. A prototype interface is fabricated using a 0.18-mu m CMOS process. The prototype is linked with a sub-1mG MEMS accelerometer, and its performance is investigated experimentally. The results confirm that the proposed interface is able to detect sub-1mG acceleration with a signal-to-noise ratio of 90.3 dB (an acceleration noise-floor of 9.0 mu G/root Hz with a bandwidth of 12 Hz). |
Year | DOI | Venue |
|---|---|---|
2018 | 10.1587/elex.15.20171227 | IEICE ELECTRONICS EXPRESS |
Keywords | Field | DocType |
time domain, capacitive-sensor interface, relaxation oscillator, sub-1mG, microelectromechanical systems (MEMS), accelerometer | Time domain,Relaxation oscillator,Microelectromechanical systems,Computer science,Accelerometer,CMOS,Capacitive sensing,Electronic engineering,Optoelectronics | Journal |
Volume | Issue | ISSN |
15 | 2 | 1349-2543 |
Citations | PageRank | References |
0 | 0.34 | 6 |
Authors | ||
8 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Motohiro Takayasu | 1 | 0 | 0.68 |
| Shiro Dosho | 2 | 123 | 20.68 |
| Hiroyuki Ito | 3 | 37 | 12.29 |
| Daisuke Yamane | 4 | 5 | 4.53 |
| Toshifumi Konishi | 5 | 0 | 1.01 |
| Katsuyuki Machida | 6 | 18 | 6.81 |
| Noboru Ishihara | 7 | 20 | 8.48 |
| Kazuya Masu | 8 | 120 | 36.37 |