Name
Title | ||
|---|---|---|
A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement. |
Abstract | ||
|---|---|---|
With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor's sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm x 0.1 mm x 2 mu m and copper electrodes of 2 mu m thick are sputtered sequentially on the substrate, and a 25 mu m thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa(-1). The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size. |
Year | DOI | Venue |
|---|---|---|
2018 | 10.3390/s18030736 | SENSORS |
Keywords | Field | DocType |
ultra-high pressure sensor,manganin thin film,MEMS technology,detonation pressure,microscale measurement | Analytical chemistry,Composite material,Detonation,Microelectromechanical systems,Microscale chemistry,Pressure measurement,Manganin,Pressure sensor,Thin film,Engineering,Piezoresistive effect | Journal |
Volume | Issue | ISSN |
18 | 3 | 1424-8220 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
8 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| guodong zhang | 1 | 1 | 4.06 |
| Yulong Zhao | 2 | 42 | 20.76 |
| yun zhao | 3 | 10 | 5.93 |
| Xinchen Wang | 4 | 7 | 1.51 |
| Xueyong Wei | 5 | 0 | 1.35 |
| Wei Ren | 6 | 214 | 21.37 |
| Hui Li | 7 | 814 | 92.33 |
| You Zhao | 8 | 7 | 2.14 |