Title
Visual Servoing-Based Nanorobotic System for Automated Electrical Characterization of Nanotubes inside SEM.
Abstract
The maneuvering and electrical characterization of nanotubes inside a scanning electron microscope (SEM) has historically been time-consuming and laborious for operators. Before the development of automated nanomanipulation-enabled techniques for the performance of pick-and-place and characterization of nanoobjects, these functions were still incomplete and largely operated manually. In this paper, a dual-probe nanomanipulation system vision-based feedback was demonstrated to automatically perform 3D nanomanipulation tasks, to investigate the electrical characterization of nanotubes. The XY-position of Atomic Force Microscope (AFM) cantilevers and individual carbon nanotubes (CNTs) were precisely recognized via a series of image processing operations. A coarse-to-fine positioning strategy in the Z-direction was applied through the combination of the sharpness-based depth estimation method and the contact-detection method. The use of nanorobotic magnification-regulated speed aided in improving working efficiency and reliability. Additionally, we proposed automated alignment of manipulator axes by visual tracking the movement trajectory of the end effector. The experimental results indicate the system's capability for automated measurement electrical characterization of CNTs. Furthermore, the automated nanomanipulation system has the potential to be extended to other nanomanipulation tasks.
Year
DOI
Venue
2018
10.3390/s18041137
SENSORS
Keywords
Field
DocType
automated nanomanipulation,visual servoing,carbon nanotubes (CNTs)
Computer vision,Cantilever,Scanning electron microscope,Image processing,Electronic engineering,Robot end effector,Eye tracking,Visual servoing,Artificial intelligence,Carbon nanotube,Engineering,Trajectory
Journal
Volume
Issue
ISSN
18
4.0
1424-8220
Citations 
PageRank 
References 
0
0.34
4
Authors
9
Name
Order
Citations
PageRank
Huiyang Ding100.34
Chaoyang Shi2244.65
Li Ma321122.96
Zhan Yang42416.44
Mingyu Wang513524.90
Yaqiong Wang672.19
Tao Chen7125.04
Lining Sun823374.08
Toshio Fukuda92723818.58