Title
A Flexible Capacitive Tactile Sensor for Manipulator.
Abstract
A flexible capacitive tactile sensor with micro needle structure is designed in this paper for the palm and fingers of the manipulator. The sensor has better sensitivity, stability and repeatability and the spatial layout of the manipulator tactile sensor is designed in this paper. The main raw material PDMS is prepared to meet the requirements of a flexible tactile sensor. The silicon-based MEMS technology is used to achieve a tiny micro needle structure. Experimental results show that the sensor is proved to work well and able to guarantee a better sensitivity at 30 N pressure.
Year
DOI
Venue
2016
10.1007/978-981-10-5230-9_31
Communications in Computer and Information Science
Keywords
DocType
Volume
Flexible tactile sensor,Micro needle,Silicon-based MEMS technology
Conference
710
ISSN
Citations 
PageRank 
1865-0929
0
0.34
References 
Authors
0
5
Name
Order
Citations
PageRank
Jintao Zhang18811.20
Jing Cui23913.93
Yuanshen Lu300.34
Xu Zhang400.68
Xiaohui Hu5178.10