Title
DeepNAP: Deep neural anomaly pre-detection in a semiconductor fab.
Abstract
Anomaly detection in an industrial process is crucial for preventing unexpected economic loss. Among various signals, multivariate time series signals are one of the most difficult signals to analyze for detecting anomalies. Moreover, labels for anomalous signals are often unavailable in many fields. To tackle this problem, we present DeepNAP which is an anomaly pre-detection model based on recurrent neural networks. Without any annotated data, DeepNAP successfully learns to detect anomalies using partial reconstruction. Furthermore, detecting anomalies in advance is essential for preventing catastrophic events. While previous studies focused mainly on capturing anomalies after they have occurred, DeepNAP is able to pre-detect anomalies. We evaluate DeepNAP and other baseline models on a real multivariate dataset generated from a semiconductor manufacturing fab. Compared with other baseline models, DeepNAP achieves the best performance on both the detection and pre-detection of anomalies.
Year
DOI
Venue
2018
10.1016/j.ins.2018.05.020
Information Sciences
Keywords
Field
DocType
Anomaly detection,Long short term memory,Multivariate,Time series data
Time series,Anomaly detection,Pattern recognition,Multivariate statistics,Semiconductor device fabrication,Long short term memory,Recurrent neural network,Semiconductor fab,Artificial intelligence,Machine learning,Mathematics
Journal
Volume
ISSN
Citations 
457
0020-0255
0
PageRank 
References 
Authors
0.34
14
5
Name
Order
Citations
PageRank
Chunggyeom Kim100.34
Jinhyuk Lee2997.95
Raehyun Kim342.94
Youngbin Park445.85
Jaewoo Kang51258179.45