Name
Title | ||
|---|---|---|
Identifying Position-Dependent Mechanical Systems: A Modal Approach with Applications to Wafer Stage Control. |
Abstract | ||
|---|---|---|
Increasingly stringent performance requirements for motion control necessitate the use of increasingly detailed models of the system behavior. Motion systems inherently move, therefore, spatio-temporal models of the flexible dynamics are essential. In this paper, a two-step approach for the identification of the spatio-temporal behavior of mechanical systems is developed and applied to a prototype industrial wafer stage with a lightweight design for fast and highly accurate positioning. The proposed approach exploits a modal modeling framework and combines recently developed powerful linear time invariant (LTI) identification tools with a spline-based mode-shape interpolation approach to estimate the spatial system behavior. The experimental results for the wafer stage application confirm the suitability of the proposed approach for the identification of complex position-dependent mechanical systems, and show the pivotal role of the obtained models for improved motion control performance. |
Year | Venue | Field |
|---|---|---|
2018 | arXiv: Systems and Control | Spline (mathematics),LTI system theory,Wafer,Motion control,Control theory,Interpolation,Mechanical system,Mathematics,Modal |
DocType | Volume | Citations |
Journal | abs/1807.06942 | 0 |
PageRank | References | Authors |
0.34 | 7 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Robbert Voorhoeve | 1 | 0 | 0.34 |
| Robin de Rozario | 2 | 0 | 0.34 |
| Wouter H. T. M. Aangenent | 3 | 10 | 3.13 |
| Oomen, T. | 4 | 95 | 17.42 |