Name
Title | ||
|---|---|---|
Tunable Fabry-Perot Interferometer Designed for Far-Infrared Wavelength by Utilizing Electromagnetic Force. |
Abstract | ||
|---|---|---|
A tunable Fabry-Perot interferometer (TFPI)-type wavelength filter designed for the long-wavelength infrared (LWIR) region is fabricated using micro electro mechanical systems (MEMS) technology and the novel polydimethylsiloxane (PDMS) micro patterning technique. The structure of the proposed infrared sensor consists of a Fabry-Perot interferometer (FPI)-based optical filter and infrared (IR) detector. An amorphous Si-based thermal IR detector is located under the FPI-based optical filter to detect the IR-rays filtered by the FPI. The filtered IR wavelength is selected according to the air etalon gap between reflectors, which is defined by the thickness of the patterned PDMS. The 8 mu m-thick PDMS pattern is fabricated on a 3 nm-thick Al layer used as a reflector. The air etalon gap is changed using the electromagnetic force between the permanent magnet and solenoid. The measured PDMS gap height is about 2 mu m, ranging from 8 mu m to 6 mu m, with driving current varying from 0 mA to 600 mA, resulting in a tunable wavelength range of 4 mu m. The 3-dB bandwidth (full width at half maximum, FWHM) of the proposed filter is 1.5 nm, while the Free Spectral Range (FSR) is 8 mu m. Experimental results show that the proposed TFPI can detect a specific wavelength at the long LWIR region. |
Year | DOI | Venue |
|---|---|---|
2018 | 10.3390/s18082572 | SENSORS |
Keywords | Field | DocType |
FPI,IR detector,optical filter | Fabry–Pérot interferometer,Optics,Electronic engineering,Far infrared,Engineering,Wavelength | Journal |
Volume | Issue | Citations |
18 | 8.0 | 0 |
PageRank | References | Authors |
0.34 | 3 | 5 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Dong Geon Jung | 1 | 4 | 2.24 |
| Jun Yeop Lee | 2 | 1 | 0.69 |
| Jae Keon Kim | 3 | 0 | 0.34 |
| Daewoong Jung | 4 | 4 | 1.90 |
| Seong-Ho Kong | 5 | 0 | 0.34 |