Title
VTH subthreshold hysteresis technology and temperature dependence in commercial 4H-SiC MOSFETs.
Abstract
V-TH subthreshold hysteresis measured in commercially available 4H-SiC MOSFET is more pronounced in trench than in planar ones. All planar devices from different manufacturers exhibit an inverse temperature dependence, with the hysteresis amplitude reducing as the temperature increases, whereas all trench devices from different manufacturers exhibit the opposite behaviour. A physical interpretation is proposed, based on experimental evidence, which demonstrates that temperature dependence of the V-TH subthreshold hysteresis is related to the technology. The findings are relevant to the ongoing discussion on SiC bespoke validation standards develop. ment and contribute important new insight.
Year
DOI
Venue
2018
10.1016/j.microrel.2018.06.047
MICROELECTRONICS RELIABILITY
Keywords
DocType
Volume
Vth hysteresis,NBTI,Oxide traps,SiC MOSFET,Planar MOSFET,Trench MOSFET
Journal
88-90
ISSN
Citations 
PageRank 
0026-2714
0
0.34
References 
Authors
0
5
Name
Order
Citations
PageRank
Besar Asllani100.34
Asad Fayyaz2134.02
Alberto Castellazzi33615.34
Hervé Morel4197.15
Dominique Planson500.34