Title
Static and Low Frequency Noise Characterization of InGaAs MOSFETs and FinFETs on Insulator
Abstract
A detailed static and low frequency noise characterization of InGaAs/OI MOSFETs has been performed. The mobility in long channel devices is very good for such 20nm thin film III-Vvv channels. However, the mobility in short channel devices is strongly degraded down to sub 10nm. As in Silicon MOSFETs, this mobility limitation in scaled devices could originate from similar process-induced channel scattering centers in both III-V and Si MOSFETs. The gate dielectric/channel interface also reveals a high density of fast as well as slow oxide traps as measured by subthreshold swing and LF noise.
Year
DOI
Venue
2018
10.1109/ESSDERC.2018.8486851
2018 48th European Solid-State Device Research Conference (ESSDERC)
Keywords
Field
DocType
InGaAs,FinFET,capacitance,drain current,LF noise,characterization,modelling
Silicon on insulator,Logic gate,Infrasound,Gate dielectric,Electronic engineering,Thin film,Indium gallium arsenide,Optoelectronics,Materials science,Insulator (electricity),Silicon
Conference
ISSN
ISBN
Citations 
1930-8876
978-1-5386-5402-6
0
PageRank 
References 
Authors
0.34
0
8
Name
Order
Citations
PageRank
T. A. Karatsori100.68
K. Bennamane200.34
Christoforos Theodorou332.47
Czornomaz, L.403.38
j fompeyrine513.81
C. B. Zota600.68
C. Convcrtino700.34
Gérard Ghibaudo85134.87