Name
Title | ||
|---|---|---|
Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables. |
Abstract | ||
|---|---|---|
The feedforward controller plays an important role in the achievement of high servo performance of wafer scanning. In this paper, a novel data-driven feedforward tuning method is developed in the presence of noise. Three distinguished features make it different from the existing methods: first, high extrapolation capability to tasks; second, low requirement on the system model; and especially, thi... |
Year | DOI | Venue |
|---|---|---|
2019 | 10.1109/TIE.2018.2842756 | IEEE Transactions on Industrial Electronics |
Keywords | Field | DocType |
Feedforward systems,Task analysis,Tuning,Iterative methods,Instruments,Data models,Servomotors | Convergence (routing),Data modeling,Control theory,Iterative method,Control theory,Integrator,Engineering,Sensitivity (control systems),System model,Feed forward | Journal |
Volume | Issue | ISSN |
66 | 4 | 0278-0046 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
5 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Fazhi Song | 1 | 2 | 2.10 |
| Yang Liu | 2 | 2 | 2.55 |
| Jian-Xin Xu | 3 | 324 | 37.81 |
| Xiaofeng Yang | 4 | 1 | 1.37 |
| Qiao Zhu | 5 | 16 | 2.10 |