Paper Info
Title
Detection and Compensation of Motion Error for Nanomanipulation Platform in Scanning Electron Microscope
Abstract
Nanomanipulation system based on scanning electron microscope(SEM) with good real-time visual feedback and nanoscale observation resolution had high operability in a vacuum working environment. Different nanomanipulation tasks of carbon nanotubes (CNTs) are carried out through the nanomanipulation system in SEM. Nanomanipulation platform existed inherent manufacture errors, installation errors and other errors, and imprecise nanomanipulation system were also time-consuming and laborious for operators. This paper presentes a method of combining the visual feedback and feedforward control to detect and compensate the motion error of the multi-dimensional SmarAct nanomanipulation platform in the nanomanipulation system in SEM. This method reduces the motion error in the X-Y direction and achieved higher operating accuracy. At the different step speed, the motion error in the X direction and Y direction is 135.7nm and 112.9nm respectively. After the feedforward compensation, the motion error in the X direction and Y direction reduces to 61.3nm and 54.1nm respectively.
Year
DOI
Venue
2018
10.1109/ICARCV.2018.8581134
2018 15th International Conference on Control, Automation, Robotics and Vision (ICARCV)
Keywords
Field
DocType
Scanning Electron Microscope (SEM),nanomanipulation,visual feedbacak,feedforward control
Control theory,Computer science,Simulation,Scanning electron microscope,Operability,Carbon nanotube,Feed forward
Conference
ISSN
ISBN
Citations 
2474-2953
978-1-5386-9583-8
0
PageRank 
References 
Authors
0.34
4
6
Name
Order
Citations
PageRank
Mingyu Wang113524.90
Yaqiong Wang272.19
Zhan Yang32416.44
Tao Chen44921.43
Lining Sun523374.08
Toshio Fukuda62723818.58