Name
Title | ||
|---|---|---|
Two-Parameter Pressure And Temperature Measuring Transducer Based On A Voltage-Controlled Mems-Elements |
Abstract | ||
|---|---|---|
In this paper the authors propose electrostatic multi-parameter measuring MEMS-transducer with shock excitation of a movable electrode. The multidimensional basis of output signals generated by a two-parameter measuring transducer under conditions of shock excitation of voltage-controlled movable MEMS-electrodes in electrostatic capacitor has been constructed. The peculiar features of a two-parameter sensor for measuring pressure and temperature are considered. Simulation of a two-parameter measuring transducer has been carried out and its calibration characteristics have been obtained. |
Year | DOI | Venue |
|---|---|---|
2018 | 10.1109/IECON.2018.8591369 | IECON 2018 - 44TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY |
Keywords | Field | DocType |
MEMS-capacitor, matrix movable electrode, electrostatic control, two-parameter measuring transducer | Electrostatics,Transducer,Capacitor,Microelectromechanical systems,Control theory,Voltage,Pressure measurement,Acoustics,Engineering,Temperature measurement,Calibration | Conference |
ISSN | Citations | PageRank |
1553-572X | 0 | 0.34 |
References | Authors | |
0 | 4 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Alla Taranchuk | 1 | 0 | 0.34 |
| Sergey Pidchenko | 2 | 0 | 0.34 |
| Daniel Avalos-Gonzalez | 3 | 0 | 0.68 |
| juan i nietohipolito | 4 | 1 | 1.76 |