Name
Abstract | ||
|---|---|---|
This article describes the design, modeling and simulation of a serial-kinematic nanopositioner machined from a single sheet of piezoelectric material. In this class of nanopo-sitioners, the flexures, sensors and actuators are completely integrated into a single monolithic structure. A non-trivial electrode topology is etched into the sheet to achieve in-plane bending and displacement of the moving platform. Finite element analysis predicts a sensitivity of 18.6 nmN in the x-axis and 18.1 nm/V in the y-axis with a voltage limit of -250 V to 1000 V. The first resonance frequency is 250 Hz in the Z axis. This design enables high-speed, long-range, lateral positioning in space-limited applications. |
Year | DOI | Venue |
|---|---|---|
2018 | 10.1109/AIM.2018.8452225 | 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) |
Keywords | Field | DocType |
integrated sensors,integrated actuators,in-plane bending,space-limited applications,monolithic serial-kinematic nanopositioner,finite element analysis,nontrivial electrode topology,single monolithic structure,piezoelectric material,frequency 250.0 Hz,voltage -250.0 V to 1000.0 V,size 18.1 nm | Kinematics,Simulation,Modeling and simulation,Computer science,Voltage,Finite element method,Bending,Acoustics,Piezoelectricity,Cartesian coordinate system,Actuator | Conference |
ISSN | ISBN | Citations |
2159-6255 | 978-1-5386-1855-4 | 0 |
PageRank | References | Authors |
0.34 | 1 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Steven Ian Moore | 1 | 3 | 1.47 |
| Meysam Omidbeike | 2 | 0 | 0.68 |
| A. J. Fleming | 3 | 9 | 4.75 |
| Yuen Kuan Yong | 4 | 66 | 11.78 |