Title
Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensors
Abstract
This article proposes a novel technique for independent measurement of strain and temperature in piezoresistive strain sensors configured in a tee-rosette. The most notable property of piezoresistive sensors is their easy integration into MEMS fabrication processes and nanopositioning systems which makes them highly advantageous for both size and cost. The foremost disadvantage associated with piezoresistive sensors is high temperature sensitivity. The proposed estimator allows independent estimation of strain and temperature, which eliminates drift due to temperature variation. Experimental results are presented for motion sensing of a piezoelectric stack actuator which shows a strain measurement with a mean absolute error of 2.16% over a temperature range of -15° C to 40°C.
Year
DOI
Venue
2018
10.1109/AIM.2018.8452304
2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
Keywords
Field
DocType
nanopositioning systems,strain measurement,tee-rosette piezoresistive strain sensors,temperature measurement,MEMS fabrication process,motion sensing,piezoelectric stack actuator,mean absolute error,temperature -15.0 degC to 40.0 degC
Microelectromechanical systems,Atmospheric temperature range,Computer science,Control theory,Acoustics,Temperature measurement,Piezoresistive effect,Fabrication,Estimator,Piezoelectricity,Actuator
Conference
ISSN
ISBN
Citations 
2159-6255
978-1-5386-1855-4
0
PageRank 
References 
Authors
0.34
2
3
Name
Order
Citations
PageRank
Meysam Omidbeike100.68
Ben Routley200.34
A. J. Fleming394.75