Title
Lithium niobate MEMS devices and subsystems for radio frequency signal processing
Abstract
This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.
Year
DOI
Venue
2017
10.1109/MWSCAS.2017.8052856
2017 IEEE 60th International Midwest Symposium on Circuits and Systems (MWSCAS)
Keywords
Field
DocType
lithium niobate,MEMS,RF,Internet of Things,VCO
Radio frequency signal,Microelectromechanical systems,Computer science,Internet of Things,Resonator,Electronic engineering,Radio frequency,Voltage-controlled oscillator,Chirp,Lithium niobate,Electrical engineering
Conference
ISSN
ISBN
Citations 
1548-3746
978-1-5090-6390-1
0
PageRank 
References 
Authors
0.34
0
6
Name
Order
Citations
PageRank
Songbin Gong131.55
Yong Ha Song200.34
Tomas Manzaneque300.34
Ruochen Lu431.55
Yansong Yang500.34
Ali Kourani600.34