Title
Probing Self-Heating in RRAM Devices by Sub-100 nm Spatially Resolved Thermometry
Abstract
Resistive memory (RRAM) is a promising technology for high density, non-volatile data storage. Metal-oxide RRAM involves forming and breaking conductive filaments (CF) in an oxide like Hf0 <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> as the mechanism of data storage. CFs are sub-50 nm in diameter [1], causing sharp temperature gradients within the RRAM oxide. However, imaging individual CFs in RRAM devices is challenging due to their nanoscale size and the presence of the top electrode (TE). While previous works have performed electrical [2] or optical averaging [3] of CF temperature, evaluating the heating of a single CF within RRAM has remained an open problem.
Year
DOI
Venue
2018
10.1109/DRC.2018.8442187
2018 76th Device Research Conference (DRC)
Keywords
DocType
ISSN
RRAM devices,resistive memory,nonvolatile data storage,metal-oxide RRAM,sharp temperature gradients,RRAM oxide,size 100.0 nm,size 50.0 nm
Conference
1548-3770
ISBN
Citations 
PageRank 
978-1-5386-3029-7
0
0.34
References 
Authors
0
5
Name
Order
Citations
PageRank
Sanchit Deshmukh100.34
Miguel Muñoz Rojo200.68
Eilam Yalon301.69
Sam Vaziri400.68
Eric Pop55012.07