Name
Abstract | ||
|---|---|---|
This paper reports on a visual servoing system capable of 2DOF nanopositioning using a novel multi-axis electrostatic MEMS (MicroElectroMechanical System) device. The high aspect ratio micromanipulator was fabricated using a high yield process with Deep Reactive Ion Etching (DRIE) on Silicon-On-Insulator (SOI) wafers, which produces larger electrostatic forces and requires lower actuation voltages compared to most existing electrostatic microactuators. A real-time sub-pixel parameterized feature tracking algorithm of +/-8.4nm resolution is incorporated into the visual servoing loop. The resulting system is capable of visually servoing to a precision of +/-20nm in two axes using the inexpensive bulk micromachined multi-axis electrostatic micromanipulator and standard microscope optics with a CCD camera. Potential applications of the system are in the manipulation of subcellular structures within biological cells, and microassembly of hybrid MEMS devices. |
Year | DOI | Venue |
|---|---|---|
2002 | 10.1007/3-540-36268-1_22 | Springer Tracts in Advanced Robotics |
Keywords | Field | DocType |
high aspect ratio,real time,electrostatic force,visual servoing,silicon on insulator,ccd camera | Microelectromechanical systems,Simulation,Voltage,Deep reactive-ion etching,Voice coil,Comb drive,Electronic engineering,Microscope,Visual servoing,Engineering,Micromanipulator,Optoelectronics | Conference |
Volume | ISSN | Citations |
5 | 1610-7438 | 0 |
PageRank | References | Authors |
0.34 | 4 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Yu Sun | 1 | 0 | 0.34 |
| Michael A. Greminger | 2 | 61 | 9.54 |
| David P. Potasek | 3 | 2 | 1.38 |
| Bradley J. Nelson | 4 | 1263 | 202.74 |