Title | ||
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Layout decomposition co-optimization for hybrid e-beam and multiple patterning lithography |
Abstract | ||
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As the feature size keeps scaling down and the circuit complexity increases rapidly, a more advanced hybrid lithography, which combines multiple patterning and e-beam lithography (EBL), is promising to further enhance the pattern resolution. In this paper, we formulate the layout decomposition problem for this hybrid lithography as a minimum vertex deletion K-partition problem, where K is the number of masks in multiple patterning. Stitch minimization and EBL throughput are considered uniformly by adding a virtual vertex between two feature vertices for each stitch candidate during the conflict graph construction phase. For K = 2, we propose a primal-dual method for solving the underlying minimum odd-cycle cover problem efficiently. In addition, a chain decomposition algorithm is employed for removing all “non-cyclable” edges. For K > 2, we propose a random-initialized local search method that iteratively applies the primal-dual solver. Experimental results show that compared with a two-stage method, our proposed methods reduce the EBL usage by 64.4% with double patterning and 38.7% with triple patterning on average for the benchmarks. |
Year | Venue | Keywords |
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2015 | IEEE Trans. on CAD of Integrated Circuits and Systems | optimisation,layout decomposition cooptimization,multiple patterning lithography,ebl,stitch minimization,vertex deletion k-partition problem,chain decomposition algorithm,electron beam lithography,pattern resolution,hybrid lithography,hybrid e-beam lithography,random-initialized local search method |
DocType | Volume | Issue |
Conference | 35 | 9 |
ISSN | Citations | PageRank |
2153-6961 | 1 | 0.35 |
References | Authors | |
21 | 6 |
Name | Order | Citations | PageRank |
---|---|---|---|
Yunfeng Yang | 1 | 4 | 1.14 |
Wai-Shing Luk | 2 | 187 | 15.13 |
Hai Zhou | 3 | 437 | 42.37 |
Changhao Yan | 4 | 68 | 11.28 |
Xuan Zeng | 5 | 408 | 75.96 |
Dian Zhou | 6 | 260 | 56.14 |