Name
Abstract | ||
|---|---|---|
We conduct a systematic scaling analysis of the sensitivity of a silicon capacitive MEMS microphone based on a dimensionless 1-degree-of-freedom (1DOF) model considering residual stress. The theoretical normalized sensitivity we derived is a nonlinear function of normalized diaphragm size (h/a), acoustic driving frequency, 3 effective stiffness terms and the other parameters. From our 1DOF model, the optimal normalized diaphragm has to be trade-off between high sensitivity and large bandwidth. In addition, we found that a critical diaphragm radius of 415 μm for a silicon MEMS microphone, is located at the inflection point in the sensitivity function of the radius. In addition, this critical radius corresponds to the minimum effective stiffness of the microphone. |
Year | DOI | Venue |
|---|---|---|
2016 | 10.1109/NEMS.2016.7758228 | 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
Keywords | DocType | ISSN |
scaling analysis,MEMS capacitive microphone,residual stress,sensitivity,1DOF model | Conference | 2474-3747 |
ISBN | Citations | PageRank |
978-1-5090-1948-9 | 0 | 0.34 |
References | Authors | |
0 | 4 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Kui Song | 1 | 0 | 0.68 |
| Weiguan Zhang | 2 | 0 | 0.68 |
| Wei Xu | 3 | 0 | 0.34 |
| Yi-Kuen Lee | 4 | 7 | 11.16 |