Name
Title | ||
|---|---|---|
Impact of time bound constraints and batching on metallization in an opto-semiconductor fab. |
Abstract | ||
|---|---|---|
Time bound sequences are constraints deemed necessary to ensure product quality and avoid yield loss due to time dependent effects. Although they are commonly applied in production system control they cause severe logistical challenges. In this paper, we evaluate the effects of time constraints in combination with batching on a real metallization work center of an opto-semiconductor fab. We use simulation to analyze the impact of these production constraints and point out potentials to increase work center performance. We have a closer look at the required planning horizon, the influence of dedication, the capacity loss due to time bounds and the effects of batching strategies on wafer cost. Our results show the importance to tackle these issues. Furthermore, we will discuss actions taken in response to the experiments. |
Year | DOI | Venue |
|---|---|---|
2016 | 10.1109/WSC.2016.7822329 | Winter Simulation Conference |
Field | DocType | ISSN |
Data modeling,Wafer,Ensure (product),Time horizon,Capacity loss,Simulation,Semiconductor device modeling,Computer science,Semiconductor fab,Control system | Conference | 0891-7736 |
ISBN | Citations | PageRank |
978-1-5090-4484-9 | 0 | 0.34 |
References | Authors | |
0 | 6 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Falk Stefan Pappert | 1 | 4 | 2.18 |
| Tao Zhang | 2 | 2 | 3.12 |
| Oliver Rose | 3 | 17 | 10.43 |
| Fabian Suhrke | 4 | 0 | 0.68 |
| Jonas Mager | 5 | 0 | 0.68 |
| Thomas Frey | 6 | 0 | 0.34 |