Name
Title | ||
|---|---|---|
Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems. |
Abstract | ||
|---|---|---|
•Wafer lots transfer probability is used to capture flow rate of wafer lots.•An open queueing network model is constructed for material handling systems.•A robust capacity planning model is proposed to optimize vehicle quantity.•Experiments indicate the model performs well under uncertain transfer probability. |
Year | DOI | Venue |
|---|---|---|
2017 | 10.1016/j.ejor.2017.02.026 | European Journal of Operational Research |
Keywords | Field | DocType |
Production,Queueing,Robust production capacity planning,Semiconductor manufacturing,Bi-objective optimization | Monotonic function,Wafer,Mathematical optimization,Upper and lower bounds,Semiconductor device fabrication,Wafer fabrication,Capacity planning,Queueing theory,Optimization problem,Operations management,Mathematics | Journal |
Volume | Issue | ISSN |
261 | 3 | 0377-2217 |
Citations | PageRank | References |
1 | 0.34 | 12 |
Authors | ||
3 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Wenliang Chen | 1 | 449 | 41.06 |
| Zheng Wang | 2 | 64 | 12.16 |
| Felix T. S. Chan | 3 | 1267 | 113.20 |