Name
Abstract | ||
|---|---|---|
Many processes are composed of Bays with equipments. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. Most companies are trying to reduce average cycle time to increase productivity and delivery time. In this paper, we proposed simulation process standardization method in 300mm FAB semiconductor manufacturing process to propose simulation model verification method. Also we tried to prove efficiency of adopting the simulation theory in real production line. |
Year | DOI | Venue |
|---|---|---|
2006 | 10.1007/11751649_28 | ICCSA (5) |
Keywords | Field | DocType |
automated material handling system,average cycle time,simulation model verification method,inter-bay amhs,simulation process standardization method,delivery time,intra-bay lot transportation,intra-bay amhs,fab semiconductor manufacturing process,simulation theory,simulation model,semiconductor manufacturing,cycle time | Mathematical optimization,Computer science,Wafer fabrication,Semiconductor device fabrication,Operations research,Manufacturing engineering,Scheduling (production processes),Material handling,Production line,Semiconductor industry,Standardization,Manufacturing execution system | Conference |
Volume | ISSN | ISBN |
3984 | 0302-9743 | 3-540-34079-3 |
Citations | PageRank | References |
1 | 0.38 | 3 |
Authors | ||
3 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Dongsik Park | 1 | 13 | 2.76 |
| Youngshin Han | 2 | 27 | 8.28 |
| Chil-Gee Lee | 3 | 47 | 16.85 |