Title
A 19.8-mW Eddy-Current Displacement Sensor Interface With Sub-Nanometer Resolution.
Abstract
This paper presents an eddy-current sensor (ECS) interface intended for sub-nanometer (sub-nm) displacement sensing in hi-tech applications. The interface employs a 126-MHz excitation frequency to mitigate the skin effect, and achieve high resolution and stability. An efficient on-chip sensor offset compensation scheme is introduced which removes sensoroffset proportional to the standoff distance....
Year
DOI
Venue
2018
10.1109/JSSC.2018.2832168
IEEE Journal of Solid-State Circuits
Keywords
Field
DocType
Coils,Demodulation,Oscillators,Thermal stability,Sensitivity,Circuit stability,Skin
Demodulation,Skin effect,Capacitor,Computer science,Printed circuit board,Excitation,CMOS,Electronic engineering,Eddy current,Amplitude,Optoelectronics
Journal
Volume
Issue
ISSN
53
8
0018-9200
Citations 
PageRank 
References 
1
0.48
0
Authors
4
Name
Order
Citations
PageRank
Vikram Chaturvedi1243.41
Johan Vogel212.17
Kofi A. A. Makinwa3506105.58
Stoyan Nihtianov48018.83