Abstract | ||
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This paper presents an eddy-current sensor (ECS) interface intended for sub-nanometer (sub-nm) displacement sensing in hi-tech applications. The interface employs a 126-MHz excitation frequency to mitigate the skin effect, and achieve high resolution and stability. An efficient on-chip sensor offset compensation scheme is introduced which removes sensoroffset proportional to the standoff distance.... |
Year | DOI | Venue |
---|---|---|
2018 | 10.1109/JSSC.2018.2832168 | IEEE Journal of Solid-State Circuits |
Keywords | Field | DocType |
Coils,Demodulation,Oscillators,Thermal stability,Sensitivity,Circuit stability,Skin | Demodulation,Skin effect,Capacitor,Computer science,Printed circuit board,Excitation,CMOS,Electronic engineering,Eddy current,Amplitude,Optoelectronics | Journal |
Volume | Issue | ISSN |
53 | 8 | 0018-9200 |
Citations | PageRank | References |
1 | 0.48 | 0 |
Authors | ||
4 |
Name | Order | Citations | PageRank |
---|---|---|---|
Vikram Chaturvedi | 1 | 24 | 3.41 |
Johan Vogel | 2 | 1 | 2.17 |
Kofi A. A. Makinwa | 3 | 506 | 105.58 |
Stoyan Nihtianov | 4 | 80 | 18.83 |