Title
Performance Enhancement of an Improved Design of 6-axis Single-Mass Piezoelectric IMU
Abstract
In this paper, the performance of a new design of a piezoelectric Inertial Measurement Unit system (EMU) is evaluated through FEM simulations. This paper compares performance of a new proposed design with a previously reported one. The proposed sensor relies on Coriolis Effect for angular velocity detection and on direct piezoelectric Effect for acceleration measurements. This work addresses the detection improvement of both angular velocity and acceleration motions through a new proposed design. Compared to the reported design, the new structure produces an increase of 37.5% in the output voltage for a z-axis acceleration of 10 g. Similarly, for an angular velocity of 180 deg/s, an output voltage of 1 V is obtained from the new design compared to 200 mV from the reported one.
Year
DOI
Venue
2018
10.1109/ICM.2018.8703996
2018 30th International Conference on Microelectronics (ICM)
Keywords
Field
DocType
Oscillators,Angular velocity,Force,Microelectronics,Finite element analysis,Electrodes,Acceleration
Oscillation,Angular velocity,Microelectronics,Computer science,Voltage,Electronic engineering,Finite element method,Inertial measurement unit,Acceleration,Acoustics,Piezoelectricity
Conference
ISSN
ISBN
Citations 
2159-1679
978-1-5386-8167-1
0
PageRank 
References 
Authors
0.34
0
5
Name
Order
Citations
PageRank
Hela Almabrouk100.68
Sinda Kaziz200.68
B. Mezghani324.11
F. Tounsi425.12
Yves Bernard502.03