Name
Title | ||
|---|---|---|
Conditioning Circuit for Simultaneous Sensing and Actuation in Piezoelectric MEMS Resonators |
Abstract | ||
|---|---|---|
This paper presents a conditioning circuit able to simultaneously actuate and measure the output of an integrated resonator with embedded aluminum nitride (AlN) layer. The basic idea is to use this active layer as actuation transducer and as sensor to detect the resonant frequency of a MEMS oscillator. In this context a suitable conditioning system has been developed and the working principle has been demonstrated with a MEMS cantilever fabricated in PiezoMUMPs technology, used as a mass sensor. The sensor was characterized by means of known masses of Al
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nano-particles, deposited at the free end of the beam. The proposed architecture has been studied and modeled, and a prototype of the MEMS has been characterized demonstrating the validity of the proposed technique. |
Year | DOI | Venue |
|---|---|---|
2019 | 10.1109/SAS.2019.8705996 | 2019 IEEE Sensors Applications Symposium (SAS) |
Keywords | Field | DocType |
Micromechanical devices,Resonant frequency,Aluminum nitride,Sensors,III-V semiconductor materials,Frequency measurement,Oscillators | Transducer,Active layer,Microelectromechanical systems,Nitride,Computer science,Cantilever,Resonator,Real-time computing,Beam (structure),Optoelectronics,Piezoelectricity | Conference |
ISBN | Citations | PageRank |
978-1-5386-7713-1 | 2 | 0.47 |
References | Authors | |
0 | 6 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Ada Fort | 1 | 463 | 78.26 |
| Enza Panzardi | 2 | 3 | 3.24 |
| Tommaso Addabbo | 3 | 175 | 35.37 |
| Marco Mugnaini | 4 | 111 | 34.91 |
| Valerio Vignoli | 5 | 143 | 41.90 |
| Carlo Trigona | 6 | 37 | 25.08 |