Name
Title | ||
|---|---|---|
A Resonant Pressure Microsensor with the Measurement Range of 1 MPa Based on Sensitivities Balanced Dual Resonators. |
Abstract | ||
|---|---|---|
This paper presents a resonant pressure microsensor with the measurement range of 1 MPa suitable for the soaring demands of industrial gas pressure calibration equipment. The proposed microsensor consists of an SOI layer as a sensing element and a glass cap for vacuum packaging. The sensing elements include a pressure-sensitive diaphragm and two resonators embedded in the diaphragm by anchor structures. The resonators are excited by a convenient Lorentz force and detected by electromagnetic induction, which can maintain high signal outputs. In operation, the pressure under measurement bends the pressure-sensitive diaphragm of the microsensor, producing frequency shifts of the two underlining resonators. The microsensor structures were designed and optimized using finite element analyses and a 4 SOI wafer was employed in fabrications, which requires only one photolithographic step. Experimental results indicate that the Q-factors of the resonators are higher than 25,000 with a differential temperature sensitivity of 0.22 Hz/degrees C, pressure sensitivities of 6.6 Hz/kPa, and -6.5 Hz/kPa, which match the simulation results of differential temperature sensitivity of 0.2 Hz/degrees C and pressure sensitivities of +/- 6.5 Hz/kPa. In addition, characterizations based on a closed-loop manner indicate that the presented sensor demonstrates low fitting errors within 0.01% FS, high accuracy of 0.01% FS in the pressure range of 20 kPa to 1 MPa and temperature range of -55 to 85 degrees C, and the long-term stability within 0.01% FS in a 156-day period under the room temperature. |
Year | DOI | Venue |
|---|---|---|
2019 | 10.3390/s19102272 | SENSORS |
Keywords | Field | DocType |
resonant pressure microsensor,1 MPa,dual resonators,sensitivity | Silicon on insulator,Wafer,Analytical chemistry,Electromagnetic induction,Atmospheric temperature range,Resonator,Finite element method,Engineering,Optoelectronics,Calibration,Lorentz force | Journal |
Volume | Issue | ISSN |
19 | 10.0 | 1424-8220 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
7 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Yulan Lu | 1 | 1 | 1.11 |
| Pengcheng Yan | 2 | 0 | 0.68 |
| Chao Xiang | 3 | 0 | 0.68 |
| Deyong Chen | 4 | 13 | 10.49 |
| Junbo Wang | 5 | 54 | 16.41 |
| Bo Xie | 6 | 27 | 3.79 |
| Jian Chen | 7 | 23 | 15.42 |