Paper Info
Title
Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison
Abstract
Copious research has been conducted on Capacitive Pressure Sensors over the decades with a focus on Silicon being the primary filming element. However, due to Silicon Carbide emerging as superior in harsh environmental conditions, the research is gravitating towards it for industrial applications. This work presents a new analytical model for a polycrystalline silicon carbide-based capacitive pressure sensor working in touch-mode operation. Carbide demonstrates properties like electrical stability, mechanical robustness and chemical inertness which puts it on the frontier of research. The mathematical model proposed is a simple yet powerful tool in manipulating design and sizing for fast analysis. It is quicker and bypasses the need for complex simulation software. The analysis is purely mathematical and hence the results are analyzed with MATLAB. The mathematical model developed is verified with a standard Finite Element Analysis (FEM) using COMSOL v5.2. The results of the mathematical analysis dovetail well with the FEM analysis and show a significant improvement in both the sensitivity and capacitance generated.
Year
DOI
Venue
2019
10.1142/S0218126619502062
JOURNAL OF CIRCUITS SYSTEMS AND COMPUTERS
Keywords
Field
DocType
Touch mode,capacitive pressure sensor,linear range,touch point pressure,silicon carbide
Diaphragm (structural system),Microelectromechanical systems,Computer simulation,Computer science,Silicon carbide,Mechanical engineering,Capacitive sensing,Electronic engineering,Pressure sensor,Linear range,Silicon
Journal
Volume
Issue
ISSN
28
12.0
0218-1266
Citations 
PageRank 
References 
0
0.34
1
Authors
3
Name
Order
Citations
PageRank
Sumit Kumar Jindal100.68
M. Aditya Varma200.34
Deepali Thukral300.34