Paper Info
Title
Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model
Abstract
We proposed a general 1-dimensional (1D) and SPICE model for the parametric analysis and efficient optimization of Micro Thermoresistive Convective Accelerometers (MTCA). The validated sensor model with 6 key parameters can predict (1) the sensor output, sensitivity and power consumption, (2) the optimal distance (D <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">o</sub> ) between microheater and thermoresisitve temperature sensors, (3) the overheat temperature (ΔT <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">h</sub> =T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">h</sub> -T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">a</sub> ), (4) membrane thickness (t), (5) the depth of cavity (h). This proposed model can significantly reduce CPU time compared with CFD model by a factor of 1.16 million (10h/0.031s). The optimized MTCA using the engine oil as the working fluid can achieve the sensitivity of 1,680 μV/g, nearly 10 times higher than the best MTCA reported in the literature.
Year
DOI
Venue
2018
10.1109/NEMS.2018.8556940
2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Keywords
DocType
ISSN
Micro Thermal Convective Accelerometer,ID theoretical model,Rayleigh Number,Prandtl Number
Conference
2474-3747
ISBN
Citations 
PageRank 
978-1-5386-5274-9
0
0.34
References 
Authors
0
6
Name
Order
Citations
PageRank
Xiaoyi Wang100.34
Wei Xu2411.47
Beiqi Lijin300.34
Moaaz Ahmed492.77
Amine Bermak549390.25
Yi-Kuen Lee6711.16