Paper Info
Title
Cooperation Method Of Symmetrically Distributed Multi-Nanorobotic Manipulators Inside Sem For Nanodevice Constructing
Abstract
This paper presented a series of cooperation strategies of symmetrically distributed multi-nanorobotic manipulators according to different tasks during nanodevice fabrication inside scanning electron microscopy (SEM). For constructing carbon nanotube (CNT) based nanodevice such as carbon nanotube field effect transistor (CNTFET), the mainly assembly processes implemented by different nanorobotic manipulators were discussed. Manipulation strategies for each task during assembly were established based on nanorobotic manipulation system. Experiments were designed and carried out to evaluate the effectiveness of different manipulation strategies designed for multi-task. The results shown that the designed manipulation strategies was adapted for the nanorobotic manipulation system during CNT based nanodevice assembly.
Year
DOI
Venue
2018
10.1109/NEMS.2018.8556984
NEMS
Keywords
DocType
ISSN
SEM, Nanomanipulation, nanodevice assemly, multi-manipulator cooperation
Conference
2474-3747
Citations 
PageRank 
References 
0
0.34
0
Authors
6
Name
Order
Citations
PageRank
Mingyu Wang113524.90
Yaqiong Wang272.19
Zhan Yang32416.44
Tao Chen402.03
Lining Sun523374.08
Toshio Fukuda62723818.58