Title
Fabrication Of Multi-Size Nanopores Auto-Positioning On Pyramidal Membrane Tip By Multi-Level Voltage Pulses
Abstract
In this paper, we demonstrate an efficient and convenient way to fabricate auto-positioning nanopores on pyramidal SiO2 membrane by controlled dielectric breakdown method. Multi-level voltage pulses with different interval time were used to fabricate nanopore with various initial feature sizes. 10 nm and 44 nm nanopores are obtained by different fabrication modes. Modulation mode was then adopted for pore size tuning. The initial size of the nanopore and nanopores' electrical properties has been carefully discussed.
Year
DOI
Venue
2018
10.1109/NEMS.2018.8556917
NEMS
DocType
ISSN
Citations 
Conference
2474-3747
0
PageRank 
References 
Authors
0.34
0
4
Name
Order
Citations
PageRank
Yifan Wang100.68
Qi Chen200.68
Tao Deng300.68
Zewen Liu425.78