Title | ||
---|---|---|
Fabrication Of Multi-Size Nanopores Auto-Positioning On Pyramidal Membrane Tip By Multi-Level Voltage Pulses |
Abstract | ||
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In this paper, we demonstrate an efficient and convenient way to fabricate auto-positioning nanopores on pyramidal SiO2 membrane by controlled dielectric breakdown method. Multi-level voltage pulses with different interval time were used to fabricate nanopore with various initial feature sizes. 10 nm and 44 nm nanopores are obtained by different fabrication modes. Modulation mode was then adopted for pore size tuning. The initial size of the nanopore and nanopores' electrical properties has been carefully discussed. |
Year | DOI | Venue |
---|---|---|
2018 | 10.1109/NEMS.2018.8556917 | NEMS |
DocType | ISSN | Citations |
Conference | 2474-3747 | 0 |
PageRank | References | Authors |
0.34 | 0 | 4 |
Name | Order | Citations | PageRank |
---|---|---|---|
Yifan Wang | 1 | 0 | 0.68 |
Qi Chen | 2 | 0 | 0.68 |
Tao Deng | 3 | 0 | 0.68 |
Zewen Liu | 4 | 2 | 5.78 |