Abstract | ||
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A thermal flow sensor integrated with a programmable electronic interface into the same chip is proposed. The sensing structure is a micro-calorimeter with a double heater configuration fabricated with a simple post-processing technique applied to chip designed with a commercial CMOS process. The electronic interface is based on a low-noise, low-power instrumentation amplifier and a configurable heater current driver. The device characterization in nitrogen confirms the possibility to manage the trade-off between the sensitivity and the power delivered to the device by means of the programmable interface. |
Year | DOI | Venue |
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2016 | 10.1007/978-3-319-55077-0_1 | Lecture Notes in Electrical Engineering |
Keywords | DocType | Volume |
Thermal flow sensor,Electronic interface,Chopper amplifier,System-on-Chip (SoC) | Conference | 431 |
ISSN | Citations | PageRank |
1876-1100 | 0 | 0.34 |
References | Authors | |
1 | 4 |
Name | Order | Citations | PageRank |
---|---|---|---|
Massimo Piotto | 1 | 4 | 3.89 |
Filippo Dell'Agnello | 2 | 0 | 0.34 |
Simone Del Cesta | 3 | 0 | 1.01 |
Paolo Bruschi | 4 | 62 | 17.83 |