Title
Integrated Thermal Flow Sensors with Programmable Power-Sensitivity Trade-Off.
Abstract
A thermal flow sensor integrated with a programmable electronic interface into the same chip is proposed. The sensing structure is a micro-calorimeter with a double heater configuration fabricated with a simple post-processing technique applied to chip designed with a commercial CMOS process. The electronic interface is based on a low-noise, low-power instrumentation amplifier and a configurable heater current driver. The device characterization in nitrogen confirms the possibility to manage the trade-off between the sensitivity and the power delivered to the device by means of the programmable interface.
Year
DOI
Venue
2016
10.1007/978-3-319-55077-0_1
Lecture Notes in Electrical Engineering
Keywords
DocType
Volume
Thermal flow sensor,Electronic interface,Chopper amplifier,System-on-Chip (SoC)
Conference
431
ISSN
Citations 
PageRank 
1876-1100
0
0.34
References 
Authors
1
4
Name
Order
Citations
PageRank
Massimo Piotto143.89
Filippo Dell'Agnello200.34
Simone Del Cesta301.01
Paolo Bruschi46217.83