Paper Info
Title
A 2-in-1 Temperature and Humidity Sensor Achieving 62 fJ·K<sup>2</sup> and 0.83 pJ·(%RH)<sup>2</sup>
Abstract
This paper presents the first reported CMOS 2-in-1 relative humidity (RH) and temperature (Temp) sensor. A unified analog front-end (AFE) interfaces two on-chip transducers and converts the resistance (a Temp) and capacitance (a RH) into a frequency. This conversion occurs with high linearity (±10 ppm error) across the industrial temperature range (-40 to + 85°C) via a frequency-locked loop (FLL). An incomplete-settling switched-capacitor (SC)-based Wheatstone bridge (WhB) is proposed to sense the Rand C in a power-efficient fashion. The FLL output is digitized by a low power, time-to-digital converter (TDC) that has high resolution due to the inherent quantization noise-shaping. This system achieves excellent resolution figure-of-merits (FOMs) when normalized to RH (0.83pJ·(%RH) <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) and temperature (62 fJ·K <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ).
Year
DOI
Venue
2019
10.1109/CICC.2019.8780195
2019 IEEE Custom Integrated Circuits Conference (CICC)
Keywords
DocType
ISSN
time-to-digital converter,quantization noise-shaping,TDC,SC WhB,switched-capacitor-based Wheatstone bridge,FLL,on-chip transducers,AFE interfaces,analog front-end interfaces,CMOS 2-in-1 temperature sensor,CMOS 2-in-1 relative humidity sensor,frequency-locked loop,temperature -40 degC to 85 degC
Conference
0886-5930
ISBN
Citations 
PageRank 
978-1-5386-9396-4
0
0.34
References 
Authors
3
4
Name
Order
Citations
PageRank
Haowei Jiang1165.18
Chih-Cheng Huang210.72
Matthew K. Chan3123.37
Hall, D.A.411.98