Paper Info
Title
Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism.
Abstract
This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is designed. The dynamics and mechanical sensitivity of the design are theoretically analyzed. The improvement rate of mechanical sensitivity (IRMS) is introduced to represent the optimization effect of the new structure compared with the conventional one. The analytical solutions illustrate that the IRMS monotonically increases with increased stiffness ratio of the power arm (SRPA) but decreases with increased stiffness ratio of the resistance arm (SRRA). Therefore, three types of gyro structures with different stiffness ratios are designed. The mechanical sensitivities increased by 79.10%, 81.33% and 68.06% by theoretical calculation. Additionally, FEM simulation demonstrates that the mechanical sensitivity of the design is in accord with theoretical results. The linearity of design is analyzed, too. Consequently, the proposed new anchored leverage mechanism TFG offers a higher displacement output of sense mode to improve the mechanical sensitivity.
Year
DOI
Venue
2019
10.3390/s19163455
SENSORS
Keywords
Field
DocType
mechanical sensitivity,tuning fork gyroscope,anchored leverage mechanism,stiffness ratio,coordinate transformation method
Gyroscope,Leverage (finance),Microelectromechanical systems,Control theory,Stiffness,Linearity,Finite element method,Electronic engineering,Engineering,Tuning fork
Journal
Volume
Issue
ISSN
19
16.0
1424-8220
Citations 
PageRank 
References 
0
0.34
0
Authors
6
Name
Order
Citations
PageRank
Zezhang Li100.68
Shiqiao Gao201.01
Lei Jin341.53
Haipeng Liu400.34
Yanwei Guan500.34
Shigang Peng600.34