Title
High-Performance Quasi-Vertical GaN Schottky Barrier Diode on Silicon Substrate with a Low Dislocation Density Drift Layer
Abstract
In this letter, based on a new growth strategy, we demonstrate a high-performance quasi-vertical GaN Schottky barrier diode (SBD) fabricated on the hetero-epitaxial layer on silicon, with the highest current on/off ratio of 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">10</sup> , the lowest specific on-resistance of 0.95 mΩ·cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , and the lowest ideality factor of 1.23 among the GaN quasi-vertical GaN SBD reported until now. It reveals the great potential of the GaN vertical structure device on Si thanks to the novel growth strategy, which is capable of realizing low density of threading dislocation and thick epitaxial layer at the same time.
Year
DOI
Venue
2019
10.1109/ICICDT.2019.8790866
2019 International Conference on IC Design and Technology (ICICDT)
Keywords
Field
DocType
GaN,vertical structure,Schottky barrier diode
Gallium nitride,Substrate (chemistry),Electronic engineering,Schottky diode,Dislocation,Engineering,Optoelectronics,Silicon,Low density,Epitaxy
Conference
ISSN
ISBN
Citations 
2381-3555
978-1-7281-1854-3
0
PageRank 
References 
Authors
0.34
1
9
Name
Order
Citations
PageRank
Yue Li1610.29
Ruiyuan Yin200.68
Ming Tao300.34
Yilong Hao4124.49
Cheng P. Wen501.01
Maojun Wang601.01
Jie Zhang721430.67
Xuelin Yang873.86
Bo Shen901.01