Name
Title | ||
|---|---|---|
Thermal Effect of PMUT and Its Application to the Heat Dissipation of Power Electronics |
Abstract | ||
|---|---|---|
This paper presents the thermal effect of piezoelectric micromachined ultrasonic transducer (PMUT) and expects to apply it to heat dissipation of power electronics. Experiment results have shown that resonant frequency of PMUT does not change much with different external heat flow disturbance (400μm: 2.28kHz for 150°C temperature difference; 2500μm: 8.82kHz for 150°C temperature difference). Therefore, when a voltage with a certain frequency is applied to the PMUT, it will resonate and form a determined distribution of acoustic streaming on the surface, which enhances heat transfer from the heat source to the adjacent air. Simulation and experiment results have shown that the longer the side length of PMUT, the smaller the frequency of it. Further, as the resonant frequency increases, the maximum acoustic streaming velocity also increases. It has been confirmed by experiment that the PMUT has a cooling effect, which varies with the input power. |
Year | DOI | Venue |
|---|---|---|
2019 | 10.1109/NEMS.2019.8915654 | 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
Keywords | Field | DocType |
PMUT,AlN,acoustic streaming,heat dissipation | Engineering physics,PMUT,Composite material,Thermal management of electronic devices and systems,Thermal effect,Power electronics,Materials science | Conference |
ISSN | ISBN | Citations |
2474-3747 | 978-1-7281-1630-3 | 0 |
PageRank | References | Authors |
0.34 | 0 | 9 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Nan Li | 1 | 0 | 0.34 |
| Yihsiang Chiu | 2 | 0 | 1.01 |
| Dan Gong | 3 | 0 | 1.01 |
| Ma Shenglin | 4 | 0 | 1.69 |
| Yunheng Sun | 5 | 0 | 0.34 |
| Tingyu Li | 6 | 0 | 0.34 |
| Hungping Lee | 7 | 0 | 1.01 |
| Huguang Liu | 8 | 0 | 1.01 |
| Jin Yufeng | 9 | 8 | 9.51 |