Paper Info
Title
Motion control of nanomanipulation platform based on feedforward compensation inside SEM
Abstract
With the rapid development and wide application of nanotechnology, nanodevice manufacturing with nanotechnology as its core has become one of the key research areas in nanotechnology. Micro-nano operating system based on scanning electron microscope (SEM) is one of the methods to realize nanodevice manufacturing. SmarAct nanomanipulation platform is an important component of micro-nano operating system, which can realize linear motion in three-dimensional space. However, due to mechanical structure and assembly errors, the SmarAct nanomanipulation platform cannot meet the stable requirements during motion. In this paper, the visual feedback and image processing are used to describe the motion trajectory of SmarAct operator. Based on the motion mechanism of SmarAct operator, the error source is analyzed, at the same time, the motion error is modeled according to the motion trajectory. The feedforward compensation is used to realize the stable linear motion of SmarAct operator, and the interpolation algorithm is used to realize the trajectory motion control of the SmarAct nanomanipulation platform.
Year
DOI
Venue
2019
10.1109/NEMS.2019.8915647
2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Keywords
Field
DocType
Scanning Electron Microscope,nanomanipulation,visual feedbacak,feedforward control
Motion control,Composite material,Mechanical engineering,Materials science,Feed forward
Conference
ISSN
ISBN
Citations 
2474-3747
978-1-7281-1630-3
0
PageRank 
References 
Authors
0.34
3
5
Name
Order
Citations
PageRank
Mingyu Wang113524.90
Zhan Yang22416.44
Tao Chen3125.04
Lining Sun423374.08
Toshio Fukuda52723818.58