Paper Info
Title
Fabrication and Evaluation of MEMS Piezoelectric Vibration Sensor with Energy Harvesting Function
Abstract
We are going to introduce a MEMS piezoelectric vibration sensor with energy harvesting function. By 8-inch MEMS fabrication line, the piezoelectric sensors were fabricated successfully. The mechanical and electrical performance of the given sensors with different design were measured comprehensively. Endurance test of temperature circles was finished and the results demonstrated that the sensor can keep a stable output for reasonable performance after severe test. Finally, case studies of given sensor are implemented for considering the potential applications.
Year
DOI
Venue
2019
10.1109/NEMS.2019.8915646
2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Keywords
Field
DocType
vibration,piezoelectric,AlN,high frequency,self-powered system
Composite material,Microelectromechanical systems,Vibration sensor,Mechanical engineering,Energy harvesting,Materials science,Fabrication,Piezoelectricity
Conference
ISSN
ISBN
Citations 
2474-3747
978-1-7281-1630-3
0
PageRank 
References 
Authors
0.34
1
7
Name
Order
Citations
PageRank
Lan Zhang100.68
Ryohei Takei200.34
Jian Lu322.25
Daiji Noda400.34
Ryo Ohta500.34
Toshihiro Itoh655.15
Takeshi Kobayashi702.03