Paper Info
Title
Novel Micro Scanning With Integrated Atomic Force Microscope And Confocal Laser Scanning Microscope
Abstract
Integrated atomic force microscope (AFM) and confocal laser scanning microscope (CLSM) can quickly obtain the three-dimensional (3-D) surface of the sample in large scanning range and recover the region of interesting (ROI) in nanoscale resolution. However, the traditional cooperative algorithm for integrated microscopes occupies too much scanning time. In this work, we develop a novel cooperative algorithm for the integrated microscopes to reduce scanning time of AFM and achieve higher scanning speed. First, the calibration of the microscopes will be implemented. Next, CLSM starts a large range scan first and then define the region of interesting (ROI) by edge detection. And then, the scan regions of the AFM are arranged based on the ROI and adaptive scanning region method is proposed to reduce the scanning time. Furthermore, variable speed scanning based on the height information obtained from CLSM image is applied to increase the AFM scanning speed. Finally, the scanning images obtained from AFM and CLSM are merged together. A series of experimental results show that proposed cooperative algorithm can save approximately 69.2% of scanning time compared with that obtained by traditional cooperative algorithm.
Year
DOI
Venue
2019
10.1109/CCTA.2019.8920500
2019 3RD IEEE CONFERENCE ON CONTROL TECHNOLOGY AND APPLICATIONS (IEEE CCTA 2019)
Keywords
Field
DocType
Atomic force microscope (AFM), confocal laser scanning microscope (CLSM), variable speed scanning, adaptive scanning range, regions of interest (ROI)
Nanoscopic scale,Atomic force microscopy,Edge detection,Optics,Lens (optics),Microscope,Confocal laser scanning microscope,Materials science,Calibration,Laser beams
Conference
Citations 
PageRank 
References 
0
0.34
0
Authors
5
Name
Order
Citations
PageRank
Meng-Hao Chou100.34
Ching-Chi Huang201.01
Yi-Lin Liu300.34
Huang-Chih Chen402.37
Li-Chen Fu51419196.64