Title
Sensor Offset Compensation for Improved Levitation Performance of Passive Maglev Transport System
Abstract
Particles are main sources of defects in display manufacturing process and have to be minimized for better productivity. The developed passive magnetic levitation (Maglev) transport system generates no particle and is suitable for vacuum applications because it has a simple and passive moving carrier. All sensors and electromagnetic actuators are installed on the ground and activated automatically depending on the carrier position. However, sensor installation errors cause unwanted fluctuations of the carrier motion and should be compensated for better levitation accuracy. In this paper, we propose sensor offset compensation algorithms to reduce pitching motion of the carrier while actuators are switched on and off. The sensor offsets are estimated from sensor measurements by the linear relation between carrier and sensor geometry. The offset compensation algorithm has been tested and verified through simulations.
Year
DOI
Venue
2019
10.1109/IECON.2019.8927792
IECON 2019 - 45th Annual Conference of the IEEE Industrial Electronics Society
Keywords
Field
DocType
magnetic levitation,maglev transport,passive maglev,sensor offset
Control theory,Measurement uncertainty,Electromagnet,Magnetic levitation,Levitation,Air gap (plumbing),Engineering,Maglev,Offset (computer science),Actuator
Conference
Volume
ISSN
ISBN
1
1553-572X
978-1-7281-4879-3
Citations 
PageRank 
References 
0
0.34
0
Authors
5
Name
Order
Citations
PageRank
Changhyun Kim1470151.39
Chang-Wan Ha212.09
Jaewon Lim300.34
Jong-Min Lee400.34
Doh Young Park500.34