Paper Info
Title
Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System
Abstract
Motion systems with multiple control loops often run at a single sampling rate for simplicity of implementation and controller design. The achievable performance in terms of position accuracy is determined by the data acquisition hardware, such as sensors, actuators, and analog-to-digital/digital-to-analog converters, which is typically limited due to economic cost considerations. The aim of this paper is to develop a multirate approach to go beyond this traditional performance/cost tradeoff, i.e., to use different sampling rates in different control loops to optimally use hardware resources. The approach appropriately deals with the inherent time-varying behavior that is introduced by multirate sampling. A multirate feedforward control design framework is presented to optimize the tracking of a dual-stage multirate system. The application of the proposed approach to an industrial dual-stage wafer system demonstrates the advantages of multirate control, both in simulations and experiments.
Year
DOI
Venue
2020
10.1109/TCST.2018.2882341
IEEE Transactions on Control Systems and Technology
Keywords
Field
DocType
Feedforward systems,Control design,Frequency control,Time-varying systems,Semiconductor device modeling,Hardware
Motion control,Control theory,Data acquisition,Sampling (signal processing),Control engineering,Automatic frequency control,Converters,Sampling (statistics),Mathematics,Actuator,Feed forward
Journal
Volume
Issue
ISSN
28
2
1063-6536
Citations 
PageRank 
References 
1
0.41
9
Authors
6
Name
Order
Citations
PageRank
Jurgen van Zundert110.41
Oomen, T.29517.42
Jan Verhaegh310.41
Wouter H. T. M. Aangenent4103.13
Duarte Antunes5276.20
W. P. M. H. Heemels62436194.41