Name
Title | ||
|---|---|---|
High-Precision Acceleration Measurement System Based on Tunnel Magneto-Resistance Effect. |
Abstract | ||
|---|---|---|
A high-precision acceleration measurement system based on an ultra-sensitive tunnel magneto-resistance (TMR) sensor is presented in this paper. A "force-magnetic-electric" coupling structure that converts an input acceleration into a change in magnetic field around the TMR sensor is designed. In such a structure, a micro-cantilever is integrated with a magnetic field source on its tip. Under an acceleration, the mechanical displacement of the cantilever causes a change in the spatial magnetic field sensed by the TMR sensor. The TMR sensor is constructed with a Wheatstone bridge structure to achieve an enhanced sensitivity. Meanwhile, a low-noise differential circuit is developed for the proposed system to further improve the precision of the measured acceleration. The experimental results show that the micro-system achieves a measurement resolution of 19 mu g/root Hz at 1 Hz, a scale factor of 191 mV/g within a range of +/- 2 g, and a bias instability of 38 mu g (Allan variance). The noise sources of the proposed system are thoroughly investigated, which shows that low-frequency 1/f noise is the dominant noise source. We propose to use a high-frequency modulation technique to suppress the 1/f noise effectively. Measurement results show that the 1/f noise is suppressed about 8.6-fold at 1 Hz and the proposed system resolution can be improved to 2.2 mu g/root Hz theoretically with this high-frequency modulation technique. |
Year | DOI | Venue |
|---|---|---|
2020 | 10.3390/s20041117 | SENSORS |
Keywords | Field | DocType |
acceleration measurement,tunnel magneto-resistance effect,1/f noise suppression | Allan variance,Scale factor,Magnetic field,System of measurement,Cantilever,Optics,Wheatstone bridge,Electronic engineering,Modulation,Acceleration,Engineering | Journal |
Volume | Issue | ISSN |
20 | 4 | 1424-8220 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Lu Gao | 1 | 0 | 0.34 |
| Fang Chen | 2 | 0 | 0.34 |
| Yingfei Yao | 3 | 0 | 0.34 |
| Dacheng Xu | 4 | 1 | 1.66 |