Title | ||
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Dense structure and motion recovery from scanning electron microscope image sequences based on factorization |
Abstract | ||
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Scanning electron microscopes (SEM) are widely used to analyse the morphology of all kind of specimen providing high resolution image data. To overcome the two-dimensional limitation, a lot of effort has been put into the recovery of the hidden third dimension based on the acquired SEM images throughout the last decades. Especially methods based on photogrammetry were identified to yield qualitatively good reconstruction results. Nevertheless, precise quantitative 3D measurements still remain a challenge. One of the key problems is the robust estimation of the motion in the acquired image sequences. A possible solution is given by the factorization method for orthographic image streams. To evaluate the applicability of this algorithm on SEM image sequences, the motion for several sequences is estimated and compared to the stage settings. Furthermore, the method is extended to obtain a dense reconstruction from a stereo-pair based on the estimated rotations between the two views. The final reconstruction results are compared to reference measurements with a confocal laser scanning microscope for a quantitative evaluation. |
Year | DOI | Venue |
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2019 | 10.1117/12.2556372 | Proceedings of SPIE |
Keywords | DocType | Volume |
scanning electron microscope,factorization,structure,motion,dense reconstruction,quantitative evaluation | Conference | 11433 |
ISSN | Citations | PageRank |
0277-786X | 0 | 0.34 |
References | Authors | |
0 | 2 |
Name | Order | Citations | PageRank |
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Stefan Töberg | 1 | 0 | 0.34 |
Eduard Reithmeier | 2 | 8 | 6.44 |